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Kimura® K13X

Generic Family: Elastomer, Specialty • Supplied by: Precision Polymer Engineering Ltd.
A dark brown high performance polymer containing a unique self- reinforcing polymer structure, developed specifically for critical semiconductor applications. The high purity of the polymer combined with the absence of any fillers makes this polymer suitable for processes involving lower feature sizes. This material has a low coefficient of thermal expansion, low compression set and has an extremely low etch rate in aggressive plasma environments.

Key Attributes
  • Exceptionally pure - does not contain any fillers which may cause particulation problems.
  • Outstanding plasma resistance - ideal for Chlorine, Fluorine & Oxygen chemistries.
  • Exceptionally low plasma etch rate
  • Low thermal expansion
  • Retro-fits existing O-ring grooves (including FKM & FFKM grooves)
  • Low permeation
  • Low out-gassing
  • Low adhesion (reduced sticking)
  • Low friction, high strength and high modulus make K13X ideal for constant force dynamic applications.

Typical Applications
  • Dynamic seals
  • Static seals
  • Wafer-handling products
General Properties

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Material Status
Commercial: Active
Documents
description

Technical Datasheet (English)

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Availability
Asia Pacific, Europe, North America
Uses
Electrical/Electronic Applications
Other Properties
Features, Appearance, Tensile Stress at 100%, Tensile Stress at 100%, Tensile Strength at Yield, Tensile Stress at Yield, Elongation at Break, Tensile Strain at Break, Compression Set, Compression Set, Durometer Hardness, Shore Hardness, IRHD Hardness, IRHD Hardness, Additional Properties, Additional Information
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Processing

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Where To Buy

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