Perlast® G70H
Perlast® G70H is available as fully moulded O-rings (any size up to 2m/6.5ft internal diameter) and fully moulded formed slit valve door seals up to 3m in length for generation 10 and above.
Key Attributes
- Excellent plasma resistance
- High temperature performance
- High mechanical strength
- High abrasion resistance
- Extremely low out-gassing properties
Typical Applications
- Slit valve door seals
- ISO valve seals
- Load lock seals
- NW / KF / ISO O-rings
一般属性
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Technical Datasheet (English)
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