Fusion TM 706 is a low-durometer, high-purity fluoroelastomer, developed for a wide range of semiconductor processing sealing applications. Special engineering applications requiring low sealing force materials, such as bonded slit valve gates, are well suited for Fusion TM 706. Recommended for use in a range of plasma equipment applications, from etch and plasma enhanced CVD to plasma ashing applications, Fusion TM 706 is ideal for sealing devices that must accommodate tolerance stack-up conditions. Fusion TM 706 offers very low-metallic ion levels and good resistance to today’s advanced process chemistries. Contact Greene Tweed’s Semiconductor engineering and sales experts for specific application recommendations.

Specifically developed for flat panel display CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, Fusion ® 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross-sections, it offers the diversity required for a variety of dynamic or static dry processing applications. Fusion ® 707 remains stable at service temperatures up to 428°F (220°C) and is ideally suited for large lid seals and bonded slit valve door seals.

Fusion TM 742 performs well in aggressive chemicals and where ultrapure materials are not required. Recommended for conventional wet and dry system applications, Fusion TM 742 has a good field performance history in both dynamic and static applications. Its mid-range durometer allows the seal to conform to a wide range of hardware features.