Nanofluor® Y75N
Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media.
Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivalled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications.
Key Attributes
- Good all round chemical and temperature resistance.
- Outstanding mechanical properties.
- Exceptional oxygen plasma resistance.
- Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems.
- Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications.
- High sealing conformity reduces surface permeation.
Typical Applications
Designed for use in semiconductor applications, including:
- NW and KF flange fittings
- Dry plasma etch
- Wet etch (acid based)
- Dry ashing
- Oxidation/diffusion
- Lithography
- Static seals: O-rings, body seals, cathode seals
- Gaskets
一般属性
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Technical Datasheet (English)
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