A translucent brown fluoropolymer compound reinforced with semi- crystalline perfluoropolymer nano-particles, specially developed to meet the demands of the semiconductor industry. Nanofluor® Y75N combines a fully fluorinated nano-filler system which significantly reduces gas permeability. The absence of metallic or carbon-based fillers produces an exceptionally pure, translucent elastomer that is less prone to chemical attack with the benefit of reduced swelling following exposure to aggressive media. Nanofluor® Y75N is a truly novel material which bridges the gap between fluorocarbons (FKM) and perfluoroelastomers (FFKM). Its high fluorine content provides unrivalled purity, excellent high temperature capability and very good chemical resistance. Nanofluor® Y75N is a cost effective upgrade from FKM and fluorosilicone in many semiconductor applications. Key Attributes - Good all round chemical and temperature resistance. - Outstanding mechanical properties. - Exceptional oxygen plasma resistance. - Exceptionally pure - does not contain any inorganic fillers or metal oxides which cause particulation problems. - Extremely low permeability and out-gassing properties making it ideal for vacuum sealing applications. - High sealing conformity reduces surface permeation. Typical Applications Designed for use in semiconductor applications, including: - NW and KF flange fittings - Dry plasma etch - Wet etch (acid based) - Dry ashing - Oxidation/diffusion - Lithography - Static seals: O-rings, body seals, cathode seals - Gaskets